AIソスナ費ソスソスソスソスフの撰ソスソスソスソスHソスソスソスソスソスナ適ソスソスソス@ソスEソスGソスnソス[ソスソスソスソスfソスoソスCソスXソスワで茨ソスCソスハ貫ゑソスソスFソスナ適ソスソスソスソスソスヤゑソス1000ソスソスソスソス1ソスノ短ソスk
ソスソスソステ会ソスソスソスwソス笳晢ソスソスソスwソスソスソスソスソスソスソスAソスOソスソスソス[ソスoソスソスソスEソスFソス[ソスnソスYソスEソスWソスソスソスpソスソスソスAソスAソスCソスNソスソスソスXソス^ソスソスソスソスソスソスム、ソス\ソスjソス[ソスZソス~ソスRソスソスソス_ソスNソス^ソス}ソスjソスソスソスtソス@ソスNソス`ソスソスソスソスソスソスソスOソスヘ、ソスVソスソスソスRソスソスソスiSiソスjソスEソスGソスnソス[ソスソスソスソスソスソスソスソスCMOSソスCソスソスソス[ソスWソスZソスソスソスTソス[ソスiCISソスjソスソスソスソスソスワでの工ソスソスソスソスソスソスCソスハ貫で最適ソスソスソスソスソス驍アソスニに撰ソスソスソスソスソスソスソスソスBソスナ適ソスソスソスノ要ソスソスソス骼橸ソスヤゑソスソス]ソスソスソスソス1000ソスソスソスソス1ソスノ短ソスkソスナゑソスソスソスソスニゑソスソスソスソスB
CISソスネ外ソスフ撰ソスソスソスソスノゑソスソスKソスソスソスナゑソスソスソスvソスソスソスbソスgソスtソスHソス[ソスソスソスソスソスJソスソス
ソス@ソスソスソステ会ソスソスソスwソス笳晢ソスソスソスwソスソスソスソスソスソスソスAソスOソスソスソス[ソスoソスソスソスEソスFソス[ソスnソスYソスEソスWソスソスソスpソスソスソスAソスAソスCソスNソスソスソスXソス^ソスソスソスソスソスソスム、ソス\ソスjソス[ソスZソス~ソスRソスソスソス_ソスNソス^ソス}ソスjソスソスソスtソス@ソスNソス`ソスソスソスソスソスソスソスOソスソス2025ソスN3ソスソスソスAソスVソスソスソスRソスソスソスiSiソスjソスEソスGソスnソス[ソスソスソスソスソスソスソスソスCMOSソスCソスソスソス[ソスWソスZソスソスソスTソス[ソスiCISソスjソスソスソスソスソスワでの工ソスソスソスソスソスソスCソスハ貫で最適ソスソスソスソスソス驍アソスニに撰ソスソスソスソスソスソスソスソスニ費ソスソス\ソスソスソスソスソスBソスナ適ソスソスソスノ要ソスソスソス骼橸ソスヤゑソスソス]ソスソスソスソス1000ソスソスソスソス1ソスノ短ソスkソスナゑソスソスソスソスニゑソスソスソスソスB
ソス@ソスソス[ソスフ費ソスソスソスソスフデソスoソスCソスXソスJソスソスソスノゑソスソスソスソストは、ソスfソスoソスCソスXソスソスソス\ソスソスソスソスソス゚るだソスソスソスナなゑソスソスAソスJソスソスソスソスソスソスソスフ会ソスソスPソスソスソスdソスvソスニなゑソスBソスソスソスフゑソスソス゚、ソス纓ャソスフウソスGソスnソス[ソスソスソスソスソスソスソス迚コソスソスソスフデソスoソスCソスXソスソスソスソスソスワで、ソスHソスソスソスSソスフゑソスソスナ適ソスソスソスソスソス驍アソスニゑソスソスソスソス゚ゑソスソストゑソスソスソスBソスニゑソスソスがソズ暦ソスソスソスソス[ソスJソス[ソスソスソスソスfソスoソスCソスXソスソスソス[ソスJソス[ソスワで、ソスeソスソスニゑソスソスAソスgソスソスソスト撰ソスソスソスソスHソスソスソスソスソスナ適ソスソスソスソスソスソスdソスgソスンはゑソスソスソスワでなゑソスソスソスソスソスソスニゑソスソスソスソスB
ソス@ソスソスソスソスヘ、ソスソス[CISソスフノソスCソスYソスソスソスソスソスソスソスPソスノ鯉ソスソスソスソスト、SiソスEソスGソスnソス[ソスソスソス[ソスJソス[ソスナゑソスソスソスOソスソスソス[ソスoソスソスソスEソスFソス[ソスnソスYソスEソスWソスソスソスpソスソスソスニ、ソス\ソスjソス[ソスZソス~ソスRソスソスソス_ソスNソス^ソス}ソスjソスソスソスtソス@ソスNソス`ソスソスソスソスソスソスソスOソスソスソスソスソスソスソスナ、ソス纓ャソスソスソス迚コソスソスソスワでの全ソスフ工ソスソスソスナ最適ソスソスソスノ趣ソスソスgソスだ。
![半導体デバイス製造工程の模式図[クリックで拡大] 出所:名古屋大学他](https://image.itmedia.co.jp/ee/articles/2504/01/tm_250401nagoya01.jpg)
ソスソスソスソスソスフデソスoソスCソスXソスソスソスソスソスHソスソスソスフ模趣ソスソス}ソスmソスNソスソスソスbソスNソスナ拡ソスソスn ソスoソスソスソスFソスソスソステ会ソスソスソスwソスソス
ソス@ソスSソスフ工ソスソスソスフ最適ソスソスソスノ鯉ソスソスソスソスト、ソスAソスCソスNソスソスソスXソス^ソスソスソスソスソスfソスWソス^ソスソスソスcソスCソスソスソスソスソス\ソスzソスソスソスAソスソスソスソスソスwソスソスソスソスソスソスソスニ厄ソスソステ会ソスソスソスwソスヘ鯉ソスソスソスソスIソスネ最適ソスソスソスAソスソスソスSソスソスソスYソスソスソスソスソスJソスソスソスソスソスソスソスBソスソスソスソスノ、ソスAソスCソスNソスソスソスXソス^ソスソスソスヘ鯉ソスソスソスソスソスソスハゑソスソスACISソスネ外ソスフ費ソスソスソスソスフデソスoソスCソスXソスソスソスソスソスノゑソスソスKソスソスソスナゑソスソスソスvソスソスソスbソスgソスtソスHソス[ソスソスソスiソスソスソス^ソスtソス@ソスNソスgソスソスソス[ソスjソスソスソスJソスソスソスソスソスソスソスB
ソス@ソスソスソスソスソスナは、BMDソスニ呼ばゑソス骭ソスラの厄ソスソスxソスソスソスzソス理想ソスIソスネ包ソスソスzソスノ近づゑソスソスソスレ的ソスヨ撰ソスソスiBMD_bulkソスソスソスソスソスBMD_surfaceソスjソスAソスhソス[ソスpソスソスソスgソスZソスxソスソスソスzソス理想ソスIソスネ包ソスソスzソスノ近づゑソスソス驍スソス゚の目的ソスヨ撰ソスソスiDopantソスjソスノ対ゑソスソスナ適ソスソスソスソスソスsソスソスソスソスソスB
ソス@ソスナ適ソスソスソスソスソスソスソスソスソスソスソスソスワでにゑソス1ソスソスソスソスネ擾ソスフ擾ソスソスソスソスTソスソスソスソスソスKソスvソスニなゑソスBソスソスソスソスソスソス]ソスソスソスフシソス~ソスソスソスソスソス[ソスVソスソスソスソスソスiSimソスjソスナ趣ソスソスsソスソスソスソスソス1ソスNソスソスソスソスソスソスニゑソスソスソスソスBソスソスソスロの撰ソスソスiソスJソスソスソスナは撰ソスソスソスソスソスソスソスネどゑソスマゑソスソスAソスVソス~ソスソスソスソスソス[ソスVソスソスソスソスソスソスソスJソスソスヤゑソスソスsソスソスソスソスソス゚、ソスナ適ソスソスソスノは撰ソスソスNソスソスソスソスソスソスソス驍アソスニゑソスソスソスソスソスBソスソスソスソスノ対ゑソスソスAソスソスソスソスJソスソスソスソスソスソスソスfソスWソス^ソスソスソスcソスCソスソスソスiAIソスjソスソスソスソスソスpソスソスソスト最適ソスソスソスソスソスsソスソスソスソスソスニゑソスソスソスA1ソスソスソスソスフ擾ソスソスソスソスTソスソスソスソス8ソスソスソスヤで奇ソスソスソスソスソスソスソスソスB
ソス@ソスソスソスソスフ鯉ソスソスソスソスソスソスハは、ソスソスソステ会ソスソスソスwソスソスソスソスソズ暦ソスソスEソスVソスXソスeソスソスソスソスソスソスソスソスソスフ宇ソスソスソスソスソスOソスソスソスソスソス笳晢ソスソスソスwソスソスソスソスソスソスソスvソスVソスmソス\ソスソスソスソスソスソスソスソスソスZソスソスソス^ソス[ソスフ沓ソス|ソスソスソスソスソスNソスqソスソスソスソスソスソスソスソスソスiソスソスソスンは厄ソスソステ会ソスソスソスwソスソスソスソスソズ暦ソスソスEソスVソスXソスeソスソスソスソスソスソスソスソスソスyソスソスソスソスソスjソスAソスOソスソスソス[ソスoソスソスソスEソスFソス[ソスnソスYソスEソスWソスソスソスpソスソスソスフ永ソスソスEソスソスソスQソスソスソスAソスAソスCソスNソスソスソスXソス^ソスソスソスフ搾ソスソスホ擾ソスソスPソスソス\ソスソスソスソスソスソスAソスソスソスト托ソスソスソスソスソスソスソスZソスpソスソスソスソスソスソスソスソスム、ソス\ソスjソス[ソスZソス~ソスRソスソスソス_ソスNソス^ソス}ソスjソスソスソスtソス@ソスNソス`ソスソスソスソスソスソスソスOソスフ谷ソスソスソスソスソス蜉イソスZソスtソスソスノゑソスソスソスソスフでゑソスソスソスB
Copyright © ITmedia, Inc. All Rights Reserved.
ソスヨ連ソスLソスソス
ソスwソスソスソス制御しソスソスソスソスソスwソス\ソスソスソスフ人ソスHソスソスソスソスソスソスソスラ撰ソスソスソスソス製
ソス阜托ソスwソスニ厄ソスソステ会ソスソスソスwソスAソスソスソスソスcソスソスwソスAソスソスソスsソスソスwソスフ鯉ソスソスソスソスOソスソスソス[ソスvソスソスソスAソスwソスソスソス制御しソスソスソスソスソスwソス\ソスソスソスフ「ソスlソスHソスソスソスソスソスソスソスラ撰ソスソスvソスフ作製ソスノ撰ソスソスソスソスソスソスソスソスBソスlソスHソスソスソスソスソスソスソスラ撰ソスソス利用ソスソスソスソスソスソスeソスハソスソスソスソスソスソス竡・ソスCソスZソスソスソスTソス[ソスフ開ソスソスソスネどに奇ソスソスメゑソスソスソスBソスソスソスソスソスフ会ソスソスpソスソスソスツ能ソスネ二硫会ソスソスソスソスソスソスuソスfソスソスソスiソスmソスソスソス{ソスソスソスソスソスソスソスソス
ソスソスBソスソスwソス笆シソステ会ソスソスソスwソスAソスソスソスkソスソスwソスソスノゑソス骭、ソスソスソスOソスソスソス[ソスvソスヘ、ソス硫会ソスソスソスソスソスソスuソスfソスソスソスフ極細構ソスソスソスiソスiソスmソスソスソス{ソスソスソスjソスソスソスAソスソスソスwソスソスソスソスソス@ソスノゑソスソスソスツ擾ソスヨ搾ソスソスソスソスソスソスxソスナ撰ソスソスソスソスソスソスソスソス驍アソスニに撰ソスソスソスソスソスソスソスソスBソスソスソスフナソスmソスソスソス{ソスソスソスヘ、ソスソスソスfソスソスソスソスソスナ搾ソスソスソスソスGソス}ソスソスソスソスソスソスソスソスソスソスソスAソスdソスqソスレ難ソスソスxソスフ搾ソスソスソスソスソスソスソスソスフとゑソスソストゑソスソスソスソスpソスナゑソスソス驍アソスニゑソスソスソスソスソスソスソスソスBソスyソスソスソスuソスXソスJソスCソスgソスソスソスzソスdソスrソスフ耐久ソスソスソスソス蝠晢ソスソスソスPソス@ソスtソスbソスfソスnソスソスソスソスソスソスソスYソスソス
ソスソスソステ会ソスソスソスwソスフ鯉ソスソスソスソスOソスソスソス[ソスvソスヘ、ソスPソスwソスJソス[ソス{ソスソスソスiソスmソス`ソスソスソス[ソスuソスiSWCNTソスjソスdソスノにフソスbソスfソスnソスソスソスソスソスソスソスソスYソスソスソスソスソス驍アソスニで、ソスyソスソスソスuソスXソスJソスCソスgソスソスソスzソスdソスrソスフ耐久ソスソスソスソス蝠晢ソスノ会ソスソスPソスナゑソスソス驍アソスニを発鯉ソスソスソスソスソスソスBソスソスソスソスソスソスソスソスソスフ趣ソスソスソスソス_ソスCソスiソス~ソスNソスXソスノゑソスソスXソスsソスソスソスソスソスソスソスソスソスo
ソスソスソステ会ソスソスソスwソスフ鯉ソスソスソスソスOソスソスソス[ソスvソスヘ、ソスソスソスソスソスwソス笂鯉ソスkソスソスwソスAソスソスソスsソスソスwソスソスソスソスム難ソスソスMソスソスwソスニ具ソスソスソスソスナ、ソスソスソスソスソスソスソスソスソスフの趣ソスソスソスソス_ソスCソスiソス~ソスNソスXソスiソスソスソスソスソスフ会ソス]ソス^ソスソスソスjソスソスソス逅カソスソスソスソスXソスsソスソスソスソスソスフ鯉ソスソスoソスノ撰ソスソスソスソスソスソスソスソスBソスソスソスソスノ、ソスソスソスソスソスソスソスソスソスフにゑソスソスソスソスソスuソスXソスsソスソスソス|ソスソスソスsソスソスソスOソスソスソスハ」ソスノゑソスソスソスト、ソスeソスソスソスwソスソスソスcソスgソスソスソスXソスsソスソスソスソスソスノ変奇ソスソスソスソスソスソス@ソス\ソスノつゑソスソストゑソスソス明ゑソスソスソスソスBソスソスソスニ趣ソスソスホゑソスソスソスソスソスソスソスソスソスソス@ソスハ子ソスRソスソスソスsソスソスソス[ソス^ソスソスソスソスソスソスソスナ托ソスソスソスナゑソスソスソスツ能ソスソスソスソス
ソスソスソスkソスソスwソス站橸ソスsソスHソス|ソス@ソスロ托ソスwソスソスフ鯉ソスソスソスソスOソスソスソス[ソスvソスヘ、ソスソスソスソスソスソスソス^ソスソスソスqソスソスソスJソスCソスソスソスソスソスソスソス^ソスソスソスqソスノ挿ソスソスソスソスソスト作成ソスソスソスソスソスlソスHソス\ソスソスソスソスソスソスソスiソスソスソス^ソス}ソスeソスソスソスAソスソスソスjソスuソスソスソスCソスJソスCソスソスソスソスソスソスソス^ソスソスソスqソスvソスソスソスAソスソスソスソスソスナ極めて具ソスソスソスソスソスソスソスソスソスソスソスソス}ソスOソスmソスソスソス|ソスソスソスソスソスgソスソスソスノなるこソスニゑソスソスmソスFソスソスソスソスソスBソスソスソスgソスフ新ソスソスソスソスソス`ソスdソスソスソスロを発鯉ソスソス@ソスソスソスソスソスソスハ信ソスヨの会ソスソスpソスノ奇ソスソスソス
ソスソスソスkソスソスwソスニ難ソスソス{ソスソスソスqソスヘ鯉ソスソスソスソスJソスソスソス@ソス\ソスAソスソスソスソスソスwソスソスソスソスソスソスソスフ具ソスソスソスソスソスソスソスソスOソスソスソス[ソスvソスヘ、ソス\ソスハ弾ソスソスソスgソスiSAWソスjソスソスソスAソスソスソスソスソズ暦ソスソスソスpソスソスソスト作製ソスソスソスソスソスソスワ格ソスqソスソスハ過ゑソスソスソスロに、ソスuソス相費ソスソスソスワ」ソスニ呼ばゑソス骭サソスロゑソスソスソスソスソスソス驍アソスニゑソスソスmソスFソスソスソスソスソスB